Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages

作者： Holly D. Carlton1, John W. Elmer1, Yan Li2, Mario Pacheco2, Deepak Goyal2, Dilworth Y. Parkinson3, Alastair A. MacDowell3 1Materials Engineering Division,Lawrence Livermore National Laboratory, 2Assembly Test and Technology Development Failure Analysis Labs,Intel Corporation, 3Advanced Light Source,Lawrence Berkeley National Laboratory

简介：

Overview

This study employs synchrotron radiation microtomography, a non-destructive three-dimensional imaging technique, to investigate a microelectronic package. The imaging process achieves high spatial resolution and rapid data acquisition.

Key Study Components

Area of Science

• Neuroscience
• Microelectronics
• Imaging Techniques

Background

• Synchrotron radiation microtomography allows for detailed imaging without damaging the sample.
• The technique is particularly useful for evaluating complex structures at the micrometer scale.
• The Advanced Light Source provides tailored setups for optimizing image quality.
• Sample size limitations exist, with a maximum field of view of 36 by 36 millimeters.

Purpose of Study

• To investigate the internal structure of a microelectronic package.
• To utilize non-destructive imaging for detailed analysis.
• To achieve high-resolution imaging in a short time frame.

Methods Used

• Synchrotron radiation microtomography was employed.
• The imaging was conducted at the Advanced Light Source in Berkeley, California.
• The sample had a cross-sectional area of approximately 17 by 17 millimeters.
• Data acquisition was completed in just 3 minutes with an 8.7 µm spatial resolution.

Main Results

• The technique successfully resolved features at both micrometer and millimeter scales.
• High flux and brightness of the synchrotron allowed for rapid imaging.
• The imaging provided valuable insights into the microelectronic package's structure.
• Results demonstrated the effectiveness of synchrotron radiation microtomography for complex samples.

Conclusions

• Synchrotron radiation microtomography is a powerful tool for non-destructive imaging.
• The method enables rapid and detailed analysis of microelectronic packages.
• Future applications may extend to other complex multi-level samples.

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