Electrospray Deposition of Uniform Thickness Ge23Sb7S70 and As40S60 Chalcogenide Glass Films

作者： Spencer Novak1, Pao-Tai Lin2,3, Cheng Li4, Nikolay Borodinov1, Zhaohong Han5, Corentin Monmeyran5, Neil Patel5, Qingyang Du5, Marcin Malinowski4, Sasan Fathpour4, Chatdanai Lumdee4, Chi Xu4, Pieter G. Kik4, Weiwei Deng6, Juejun Hu7, Anuradha Agarwal7, Igor Luzinov1, Kathleen Richardson4 1Department of Materials Science and Engineering,Clemson University, 2Department of Materials Science and Engineering,Texas A&M University, 3Department of Electrical and Computer Engineering,Texas A&M University, 4College of Optics and Photonics, Center for Research and Education in Optics and Lasers (CREOL),University of Central Florida, 5Department of Materials Science and Engineering,Massachusetts Institute of Technology, 6Department of Mechanical Engineering,Virginia Polytechnic Institute, 7Microphotonics Center,Massachusetts Institute of Technology

简介：

Overview

This study presents a method for the deposition of chalcogenide glass films using electrospray technology. The technique allows for localized deposition and the creation of films with varying thickness profiles, which is advantageous for mid-infrared photonic applications.

Key Study Components

Area of Science

• Material Science
• Photonic Applications
• Thin Film Deposition

Background

• Chalcogenide glasses are important for mid-infrared applications.
• Electrospray deposition offers unique flexibility in film fabrication.
• Localized deposition can enhance device design capabilities.
• Spatially-varying compositional gradients can be achieved.

Purpose of Study

• To develop a method for electrospray film deposition of chalcogenide glasses.
• To explore the flexibility and advantages of this deposition technique.
• To advance chip-based mid-infrared chemical sensing devices.

Methods Used

• Utilization of a single-nozzle electrospray system.
• Controlled motion via computer numerical control.
• Injection of chalcogenide glass solution into a syringe.
• Slow extraction rate to prevent bubble formation.

Main Results

• Demonstrated uniform thickness in deposited films.
• Achieved spatially-varying compositional gradients.
• Showed potential for enhanced device design in sensing applications.
• Validated the method's effectiveness for mid-infrared photonics.

Conclusions

• Electrospray deposition is a promising technique for chalcogenide glasses.
• Localized deposition allows for innovative design in photonic devices.
• The method can significantly impact mid-infrared chemical sensing technologies.

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